Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology [With CDROM]

by Seiler, David G.
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ISBN: 9780735401525
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Overview

This book/CD-ROM package presents papers from a March 2003 conference on progress in semiconductor technology, detailing major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. Scientists and engineers conc
  • Format: Hardcover
  • Author: Seiler, David G.
  • ISBN: 9780735401525
  • Condition: Used
  • Dimensions: 10.80 x 1.90
  • Number Of Pages: 818
  • Publication Year: 2003
Language: English

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